Quartz Tube Furnace for 1200°C High Vacuum and Atmosphere Furnaces

Quartz Glass Tube for 1200°C High-Vacuum Tube Furnace

Designed for high-vacuum tube furnace applications, this system utilizes a specialized quartz glass tube and high-temperature alloy resistance heating elements. It supports a maximum operating temperature of 1200°C and is equipped with a vacuum system comprising a two-stage rotary vane pump and a molecular pump, achieving a nominal vacuum level of up to 1×10⁻⁴ Pa. It is suitable for the heat treatment of materials and experimental research conducted under high-vacuum or controlled-atmosphere conditions.

Product Features

1. Specialized Quartz Glass Furnace Tube; High Vacuum Level (1×10⁻⁴ Pa)

The furnace utilizes a specialized quartz glass tube with dimensions of Φ80 × φ200 × 600 mm (heating zone). Equipped with a dual-stage rotary vane vacuum pump (pumping speed: 2 L/min) and a molecular pump unit, the system achieves a vacuum level of up to 1×10⁻⁴ Pa, meeting the requirements for high-vacuum sintering and heat treatment processes. The unit comes complete with a set of sealed flanges, a pressure gauge, and all necessary auxiliary tools.

2. Four-Sided Heating; Furnace Temperature Uniformity of ±1°C

High-temperature alloy resistance wires serve as the heating elements; they are positioned around the furnace tube and arranged horizontally. The system offers a temperature control precision of ±1°C and a furnace temperature uniformity of ±1°C (depending on the furnace chamber dimensions; multi-point temperature control can be implemented for higher uniformity requirements). A K-type thermocouple is used for temperature measurement (range: 0–1350°C), with an adjustable heating rate of 1–20°C/min.

3. Multi-Atmosphere Compatibility (Supports O₂, N₂, Ar, H₂)

The system supports the introduction of various gases—including oxygen, nitrogen, argon, and hydrogen—to accommodate diverse process requirements such as vacuum sintering, atmosphere-protected processing, and reduction reactions. Sealed flanges ensure a stable atmospheric environment.

4. 50-Segment Program Control; Multiple Communication Interfaces

Equipped with an intelligent temperature controller, the system supports various control modes—including standard PID, AI-based APID, or MPT—and features self-tuning and self-learning capabilities. It offers 50-segment program control, allowing for the input and storage of multiple temperature profiles that can be recalled and used as needed.

Power Supply AC	380V
Maximum Operating Temperature	1200°C
Long-Term Operating Temperature	1150°C
Control Range	80 to 1100°C
Temperature Control Accuracy	±1°C
Furnace Tube Material	Quartz glass tube (special-shaped tube)
Furnace Tube Dimensions	Φ80 × Φ200 × Heating zone 600mm
Furnace Temperature Uniformity	±1°C (depending on the furnace chamber size); multi-point temperature control can be adopted when higher requirements are needed
Temperature Measuring Element and Range	Nickel-chromium-nickel-silicon K-type, measuring range 0–1350°C
Heating Rate	Heating rate freely adjustable; adjustment range: fastest heating rate 20°C per minute (20°C/min), slowest heating rate 1°C per hour (1°C/h)
Heating Elements	High-temperature alloy resistance wire
Heating Element Position	Installed around the furnace tube, horizontal to the furnace tube
Furnace Body Structure and Material	The electric furnace body adopts an air-cooled double-layer carbon steel structure. An effective air-cooled guide baffle enables overall cold air circulation in the furnace shell, ultimately cooling the heating element conductive plates before discharging out of the furnace body, avoiding high-temperature oxidation of the heating element conductive plates and ensuring a good working environment
Flange	One set of sealing flange, plus pressure gauge and matching tools
Vacuum Pump	Two-stage rotary vane vacuum pump, pumping speed 2L/min + molecular pump unit. Vacuum degree can reach 1×10⁻⁴Pa
Gas Intake	Oxygen, nitrogen, argon, hydrogen and other inert gases
Refractory and Insulation Materials	The furnace lining is made of vacuum-formed high-purity alumina lightweight material, featuring high operating temperature, small heat storage, resistance to rapid heating and cooling, no cracking, no slag falling, and good insulation performance
Insulation Materials	Three-layer insulation is adopted, namely: aluminum silicate fiberboard, alumina fiberboard, and alumina (polycrystalline) fiberboard. The energy-saving effect is more than 80% that of old-style electric furnaces
Safety Protection	An integrated modular control unit is adopted for accurate control precision, and dual-loop control and dual-loop protection are designed, featuring protection against overshoot, over-regulation, under-regulation, broken thermocouple, phase loss, overvoltage, overcurrent, overtemperature, current feedback, soft start, etc.
Power-Off on Door Opening	The furnace body is designed with a function that disconnects the main heating circuit when the furnace door is opened at high temperature during operation, greatly protecting against the risk of electric shock when taking out materials at high temperature
Control	Closed-loop technology is adopted for thyristor module trigger control, with phase-shift triggering or zero-crossing triggering. Output voltage, current, or power can be continuously adjusted, featuring constant voltage, constant current, or constant power characteristics. The current loop is the inner loop, and the voltage loop is the outer loop. When a load is suddenly applied or the load current exceeds the current limiting value, the output current of the voltage regulator is limited within the rated current range to ensure normal operation of the output and the voltage regulator. At the same time, the voltage loop also participates in regulation, so that the output current of the voltage regulator is limited within the rated current range, maintaining constant output current and voltage under the premise of sufficient adjustment margin. This protects the heating elements from impact of excessive current and voltage, achieving safe and reliable control effects and control precision
Temperature Curve Setting	Adopts an intelligent temperature controller, equipped with multiple adjustment modes such as standard PID, artificial intelligence adjustment APID, or MPT, with self-tuning and self-learning functions, and excellent control characteristics of no overshoot and no undershoot. It has a 30-segment program control function, can realize heating and cooling control at any slope, has programmable/operable commands such as jump (cycle), run, pause, and stop, and allows the program to be modified at any time during controlled operation; it adopts an artificial intelligence adjustment algorithm with curve fitting function, which can obtain smooth and flat curve control effects
Number of Heating Curve Segments	50-segment program control function, can be input and set as: one curve with 50 segments, two curves with 28 segments each, three curves with 15 segments each, five curves with 9 segments each; multiple curves can be input at the same time and can be called arbitrarily during use
Furnace Body Temperature	Room temperature +25°C
Computer Interface	RS485, RS232, USB
Warranty Scope and Period	The electric furnace is provided with free warranty for one year; heating elements and furnace tubes are not covered by warranty (free replacement for natural damage to heating elements within three months)
Spare Parts	Two sets of rod tools, one feeding hopper, one manual, one certificate of conformity, two quartz heat insulation plugs, one pair of crucible tongs, one pair of high-temperature gloves

Application Areas

• High-Vacuum Material Sintering: Suitable for high-temperature sintering and heat treatment of ceramics, metals, and semiconductor materials that require a high-vacuum environment (1×10⁻⁴ Pa).
• Atmosphere-Controlled Heat Treatment: Suitable for heat treatment processes that require specific atmospheres, such as oxygen, nitrogen, argon, or hydrogen.
• Semiconductor Material Processing: Suitable for processes such as high-temperature annealing and diffusion of semiconductor materials.
• Nanomaterial Preparation: Suitable for vacuum or controlled-atmosphere heat treatment of advanced materials, including carbon nanotubes and nanopowders.
• Catalyst Research: Suitable for the activation, calcination, and reduction of catalyst materials.

Company Profile

A professional enterprise specializing in heat treatment technology services and the R&D, manufacturing, and sales of high-temperature electric furnaces.

The company focuses on developing high-temperature electric furnaces covering a full temperature range of -100℃ to 2600℃. Its products include experimental electric furnaces, vacuum atmosphere furnaces, industrial kilns, and medium-frequency induction heating equipment. Main products include box furnaces, tube furnaces, lifting furnaces, pusher kilns, bogie furnaces, rotary kilns, tunnel kilns, and various specialized medium-frequency furnaces.

The company adheres to technological innovation and has passed ISO9001 and EU CE certifications. It owns 21 registered trademarks, 29 patents, and 27 software copyrights.

Payment Methods

TT

Shipment Methods

The electric furnace is packaged in three layers: first wrapped in foam paper, then wrapped in plastic film, and finally packed in a wooden crate.

Frequently Asked Questions (FAQ)

1. What is the maximum temperature of this high-vacuum tube furnace?

The maximum operating temperature is 1200°C, with a recommended long-term operating temperature of 1150°C.

2. What vacuum level can the equipment achieve?

Equipped with a two-stage rotary vane vacuum pump and a molecular pump unit, the system has a nominal vacuum rating of 1×10⁻⁴ Pa. The actual vacuum level achieved may vary based on factors such as the sealing of the furnace tube, flange connections, system cleanliness, and specific operating conditions.

3. What are the material and dimensions of the furnace tube?

The furnace tube is made of specialized quartz glass, with dimensions of Φ80 × φ200 mm and a heated zone length of 600 mm.

4. What types of gases can be introduced into the equipment?

The equipment is technically capable of using gases such as oxygen, nitrogen, argon, and hydrogen.

5. What are the heating rate and program control capabilities?

The heating rate is adjustable, ranging from a maximum of approximately 20°C/min to a minimum of about 1°C/h. The equipment supports programmable temperature profile control, featuring 30-segment temperature control and 50-segment curve parameter settings; the exact number of program segments may vary depending on the final configuration of the temperature control system.