Double-Layer CVD Sliding Horizontal Tube Furnace

Double-Layer CVD Sliding Horizontal Tube Furnace

This dual-layer CVD sliding horizontal tube furnace adopts a modular dual-layer structure and sliding furnace body design, meeting the high requirements of high-temperature chemical vapor deposition (CVD) processes for temperature uniformity, atmosphere control, and experimental stability.

The equipment integrates a three-zone independent temperature control system with a maximum operating temperature of 1100℃, and is equipped with a Siemens S7-200 intelligent control system and an industrial-grade touchscreen interface, enabling real-time monitoring of temperature, vacuum level, and process operating status.

The high-purity quartz cavity tube combined with the high-precision atmosphere control system enables its wide application in high-end scientific research fields such as graphene growth, nanofilm deposition, new energy material research and development, and semiconductor material experiments.

Product Features ( CVD Sliding Horizontal Tube Furnace)

1. Modular Double-Layer Design, Compact Structure

This double-layer CVD sliding horizontal tube furnace adopts a modular double-layer design, featuring high integration, a compact structure, and a small footprint. The upper layer houses the heating system, while the lower layer contains the control system. This rational layout ensures good heat dissipation and facilitates operation and maintenance.

2. Sliding Horizontal Structure for Easy Loading and Unloading

The furnace body adopts a sliding horizontal opening structure, and the furnace chamber can be opened horizontally, which facilitates furnace tube cleaning, sample loading and unloading, and daily maintenance.

3. Three Independent Temperature Zones for Precise Temperature Curves

Three independent temperature zones are provided, each with its own set temperature, enabling precise temperature curve control for preheating, reaction, and cooling.

4. Touchscreen Operation, Real-Time Monitoring

The touchscreen human-machine interface provides intuitive and convenient operation. Process parameters such as temperature, vacuum level, and gas flow rate can be monitored in real time, with dynamic display of the temperature curve.

5. High-purity quartz chamber tube

The furnace tube is made of high-purity quartz glass with low impurity content, ensuring no sample contamination at high temperatures. The quartz tube’s excellent light transmittance facilitates observation of the reaction process within the furnace.

6. Vacuum and multi-atmosphere compatibility

Equipped with a vacuum system capable of evacuating to -0.1 MPa. It can accommodate various gases (nitrogen, argon, hydrogen, oxygen, etc.), meeting the stringent vacuum and atmosphere requirements of the CVD process. The gas inlet system is equipped with a mass flow meter for precise and controllable gas flow.

7. High-vacuum sealing with excellent sealing performance

The furnace tube seal utilizes a stainless steel KF flange with a double rubber ring sealing structure, ensuring reliable sealing performance.

1	130 Furnace Chamber Assembly	3 zones / Max temp 1100℃, each zone length 300mm / no partition	Aluminum silicate	2 sets	Fits 130mm OD quartz tube, with 30mm diameter furnace chamber end plugs
2	130 Preheating Furnace Chamber Assembly	1 zone / Preheating zone length 100mm, temp 300-400℃	Aluminum silicate	2 sets	Fits 130mm OD quartz tube, with 30mm diameter furnace chamber end plugs
3	130 Furnace Shell Assembly	Fits 130mm OD quartz tube	Q235	2 sets	Sheet metal processing, plastic coating RAL 9016 traffic white
4	130 Preheating Furnace Shell Assembly	Fits 130mm OD quartz tube	Q235	2 sets	Sheet metal processing, plastic coating RAL 9016 traffic white
5	Quartz Tube	OD Ø130mm	Quartz	2 pcs	Estimated length 3000mm
6	130 Water Cooling Flange Assembly	Fits 130mm OD quartz tube	SUS304	4 sets	–
7	30 Flange Assembly	Fits 30mm OD quartz tube	SUS304	4 sets	–
8	Slide Rail & Block	Rail length 3500mm / with 8 blocks	SUJ2	4 sets	–
9	Vacuum Pump	–	–	2 units	–
10	Thermocouple	Type K	–	8 pcs	–
11	Touch Screen	Screen box and mounting bracket	Kunlun Tongtai	2 pcs	Can be mounted on profile
12	Temperature Controller	Yudian	–	8 units	–
13	Filter	–	–	2 pcs	–
14	Chiller	With pressure compressor	–	1 unit	–
15	PLC Assembly	Independent electrical box, Siemens S7-200 basic version, 24V power supply, etc.	–	2 sets	Size designed based on rack width for easy hanging installation, one set on right side of upper and lower layers each
16	Pressure Gauge	–	–	2 pcs	–
17	Angle Valve	–	Stainless steel	4 pcs	–
18	Bellows	For KF25 interface connection, with clamps	–	2 pcs	Length based on floor height, proximity principle
19	Table Plate	1750×700×2mm (L×W×H)	SUS304	6 pcs	–
20	Profile Rack	3500×700×2300mm (L×W×H)	A6063-T5	1 set	One furnace on upper layer and one on lower layer
21	Cable Chain	For furnace sliding use	–	2 pcs	–

Application Areas (Double-Layer CVD Sliding Horizontal Tube Furnace)

• Graphene Growth: Optimized for graphene CVD growth processes, its three independent temperature zones allow for precise control of the reaction zone temperature distribution. A high-purity quartz chamber ensures a clean growth environment, resulting in high-quality, large-area graphene films.
• Two-Dimensional Materials: Suitable for the CVD growth of two-dimensional materials such as molybdenum disulfide (MoS₂), tungsten diselenide (WSe₂), and hexagonal boron nitride (h-BN).
• Carbon Nanotubes: Suitable for the CVD synthesis of carbon nanotubes. The multi-temperature zone design enables segmented control of catalyst activation, carbon source decomposition, and nanotube growth.
• Advanced Ceramics: Suitable for the sintering and heat treatment of ceramic materials such as alumina, zirconium oxide, and silicon nitride.
• Semiconductor Materials: Suitable for the epitaxial growth and annealing of semiconductor thin films. A high-vacuum environment ensures material purity.
• Nanomaterials: Suitable for the synthesis and heat treatment of nanomaterials such as nanowires, nanoparticles, and quantum dots.

Company Profile

A professional enterprise specializing in heat treatment technology services and the R&D, manufacturing, and sales of high-temperature electric furnaces.

The company focuses on developing high-temperature electric furnaces covering a full temperature range of -100℃ to 2600℃. Its products include experimental electric furnaces, vacuum atmosphere furnaces, industrial kilns, and medium-frequency induction heating equipment. Main products include box furnaces, tube furnaces, lifting furnaces, pusher kilns, bogie furnaces, rotary kilns, tunnel kilns, and various specialized medium-frequency furnaces.

The company adheres to technological innovation and has passed ISO9001 and EU CE certifications. It owns 21 registered trademarks, 29 patents, and 27 software copyrights.

Payment Methods

TT

Shipment Methods

The electric furnace is packaged in three layers: first wrapped in foam paper, then wrapped in plastic film, and finally packed in a wooden crate.

Frequently Asked Questions (FAQ)

1. What are the advantages of three-zone temperature control?

Three zones allow for independent temperature control of different areas, helping to create a more stable and uniform temperature field and improving material growth quality.

2. What gases can be introduced?

Supports various reactive and protective gases such as hydrogen, nitrogen, argon, and methane.

3. Does the equipment support vacuum experiments?

Yes. The equipment can operate in a vacuum environment and monitor the vacuum level in real time.

4. Why is a sliding furnace design used?

The sliding structure allows for rapid furnace movement, enabling rapid cooling and convenient sampling, while reducing the risk of thermal shock.

5. Does the control system support automation?

Yes. The Siemens PLC system enables automatic operation, data monitoring, and process parameter management.